三(二甲胺基)硅烷 , (99.999%-Si)
Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM
分子式: [(CH?)?N]?SiH
分子量: 161.32
纯度: (99.999%-Si)
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Technical Notes:
1. Volatile source of calcium for use in the growth of: calcium carbonate Ref. (1 ). Volatile source of calcium for use in the growth of: calcium oxide Ref. (2).
2.Volatile source of calcium for use in the growth of: calcium fluoride Ref. (3).
References:
1. Thin Solid Films, 2004, 450, 161 .
2.Physica B: Condensed Matter (Amsterdam, Netherlands) 2009, 404(8-1 1), 1398.
3.Chem. Mater. 2007, 19, 3387.