在半导体、显示、光电以及先进封装等高科技制造领域，沉积工艺正日益成为制程性能提升与产品良率保障的关键一环。尤其是在原子层沉积（ALD）与化学气相沉积（CVD）领域。
    百灵威专注于为高校、科研院所提供优质ALD/CVD前驱体及相关化学品，并拥有Strem Chemicals官方渠道支持。依托我们对产品质量和服务细节的严苛把控，我们提供高达99.99%纯度的前驱体材料、极具竞争力的定价策略，以及符合国际标准的钢瓶清洗服务，全面保障高校与研究所的实验安全、成本控制和工艺可重复性。

金属前驱体

• 钨 (W)

品名	CAS	货号
Tungsten hexacarbonyl, 99.99%, Used for CVD 六羰基钨	14040-11-0	184972
Tungsten(VI) chloride (99.9%-W) 六氯化钨	13283-01-7	74-2350
Tungsten carbonyl, 99% (<0.3%-Mo) 六羰基钨	14040-11-0	74-2200

• 铜 (Cu)

品名	CAS	货号
Copper(II) hexafluoroacetylacetonate, anhydrous, elec. gr. (99.99+%-Cu) PURATREM 双(六氟乙酰丙酮)合铜(II)	14781-45-4	29-2928
Copper(II) acetylacetonate, 99% 乙酰丙酮铜(II)	13395-16-9	537056

• 铂 (Pt)

品名	CAS	货号
(Trimethyl)methylcyclopentadienylplatinum(IV), 99% (三甲基)甲基环戊二烯合铂(IV)	94442-22-5	78-1350
(Trimethyl)cyclopentadienylplatinum(IV), 99% π-环戊二烯（三甲基）铂	1271-07-4	78-1300
(Trimethyl)pentamethylcyclopentadienylplatinum(IV), 99% （三甲基）五甲基环戊二烯基铂	97262-98-1	78-1358
Platinum(II) hexafluoroacetylacetonate, 98% (99.9%-Pt) 1,1,1,5,5,5-六氟乙酰丙酮铂(II)	65353-51-7	78-1550
(Trimethyl)methylcyclopentadienylplatinum(IV), 99% (99.999%-Pt) PURATREM （三甲基）甲基环戊二烯基铂（IV），99％（99.999％-Pt）	94442-22-5	98-1350

• 钼 (Mo)

品名	CAS	货号
Copper(II) hexafluoroacetylacetonate, anhydrous, elec. gr. (99.99+%-Cu) PURATREM 双(六氟乙酰丙酮)合铜(II)	14781-45-4	29-2928
Molybdenum(VI) dioxide bis(2,2,6,6-tetramethyl-3,5-heptanedionate), min. 98% [O?Mo(TMHD)?] 双（2,2,6,6 - 四甲基-3,5 - 庚二酮）二氧化钼（VI）	34872-98-5	42-1357

• 钌 (Ru)

品名	CAS	货号
Bis(cyclopentadienyl)ruthenium, 99% (99.9%-Ru) (Ruthenocene) 二茂钌	1287-13-4	44-6200
Bis(ethylcyclopentadienyl)ruthenium(II), 99.99%, trace metals basis 双(乙基环戊二烯基)钌(II)	32992-96-4	588417
Bis(N,N’-di-t-butylacetamidinato)ruthenium(II) dicarbonyl, 98% (99.99%-Ru) PURATREM 双(N,N'-二叔丁基乙二胺四乙酸)钌(II)二羰基	949113-49-9	44-0056

• 铝 (Al):

品名	CAS	货号
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)aluminum, 99% (99.9%-Al) [Al(TMHD)?] 三(2,2,6,6-四甲基-3,5-庚二酮)铝(III), 99%	14319-08-5	13-5000

• 镧 (La):

品名	CAS	货号
Tris(N,N'-di-i-propylformamidinato)lanthanum(III), (99.999+%-La) PURATREM La-FMD 三(N,N'-二-异丙基甲脒)镧(III)	1034537-36-4	57-1200

• 锑 (Sb):

品名	CAS	货号
Antimony(III) chloride, 99% 氯化锑(III)	10025-91-9	496657 危化品

• 锆 (Zr):

品名	CAS	货号
Tetrakis(dimethylamino)zirconium(IV), 98% (99.99%-Zr) PURATREM TDMAZ 四(二甲基胺基)锆(IV)	19756-04-8	40-4115

半导体元素前驱体

品名	CAS	货号
Silicon(IV) chloride, fiber optic grade (99.9999%-Si, 50ppm-Fe) PURATREM, 98-0147, contained in a 50 ml electropolished Swagelok? cylinder (96-1077) for CVD/ALD 四氯化硅	10026-04-7	98-4027 危化品
Tetraethoxysilane, TEOS (99.999%-Si) PURATREM	78-10-4	14-1454 危化品
Bis(diethylamino)silane, 98%, ≥99.99% metal basis, for CVD/ALD, please refer to the details page for ordering and cleaning cylinder 二(二乙氨基)硅烷	27804-64-4	957403
Bis(t-butylamino)silane, 98%, ≥99.99% metal basis, for CVD/ALD, please refer to the details page for ordering and cleaning cylinder 二(叔丁基氨基)硅烷	186598-40-3	474608
Germanium(IV) chloride (99.99%-Ge) PURATREM 四氯化锗	10038-98-9	32-0650 危化品

介电材料前驱体

品名	CAS	货号
Tetrakis(dimethylamino)zirconium(IV), 98% (99.99%-Zr) PURATREM TDMAZ 四(二甲基胺基)锆(IV)	19756-04-8	40-4115
Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2% Zr) TDMAH, PURATREM Tetrakis（二甲基氨基）鉿	19782-68-4	72-8000促
Titanium(IV) isopropoxide, 98% 钛酸四异丙酯(IV)	546-68-9	162947 危化品
Tantalum(V) ethoxide, 99.99% 乙醇钽(V)	6074-84-6	142830
Tetrakis(dimethylamido)hafnium(IV), 99% 四(二甲胺基)铪	19782-68-4	622857新
Tetrakis(dimethylamino)zirconium, 99% 四(二甲氨基)锆	19756-04-8	337870
Tris(3-hydroxypropyl)phosphine, min. 84% 三(3-羟基丙基)膦	4706-17-6	15-6375促
Xenon(II) fluoride, 99.5% 二氟化氙	13709-36-9	54-1500

设备关键部件

品名	CAS	货号
Swagelok? Cylinder Assembly, 50ml with 1/4 VCR Male Bellows-Sealed Valve (High Temp) and Female Nut for CVD/ALD Swagelok® 气缸, 50ml, 带1/4“VCR外波纹管密封阀(高温)和母螺母,用于CVD / ALD	/	96-1071

更多前驱体

钢瓶及清洗服务

品名	CAS	货号
Cylinder cleaning cost, The cylinder has not stored product or the previously stored product is consistent with the purchased product. 钢瓶清洗费用	/	9394472
Cylinder cleaning cost, The previously stored product is inconsistent with the purchased product. 钢瓶清洗费用	/	9394473
50ml Standard cylinder, Suitable for the vast majority of domestic equipments 50mL标准钢瓶	/	9395115
60ml Standard cylinder, Suitable for the equipment of Picosun 60mL标准钢瓶	/	9395123

钢瓶及钢瓶清洗服务不单独出售；

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